| 兴泰硅材 —— 6N硅烷产品标准 | ||||
|---|---|---|---|---|
| 项目 |
检测项目 Item |
单位 Unit |
指标 Indicator |
分析方法 Method |
| 组分要求 | SiH4 | Vol% | ≥99.9999 | — |
| H2 | ppm | ＜20.0 | GC | |
| O2 + Ar | ppm | ＜0.05 | GC | |
| N2 | ppm | ＜0.5 | GC | |
| CH4 | ppm | ＜0.05 | GC | |
| C2~C4 | ppm | ＜0.1 | GC | |
| CO | ppm | ＜0.05 | GC | |
| CO2 | ppm | ＜0.05 | GC | |
|
氯硅烷 (SiH2Cl2,etc) |
ppm | ＜0.1 | GC | |
| Si2H6 | ppm | ＜0.3 | GC | |
| H2O | ppm | ＜0.5 | Electrolysis | |
| 金属离子 | 铝 (Al) | ppb | ＜0.2 | ICPMS |
| 锑 (Sb) | ppb | ＜0.2 | ICPMS | |
| 砷 (As) | ppb | ＜0.2 | ICPMS | |
| 硼 (B) | ppb | ＜0.2 | ICPMS | |
| 镓 (Ga) | ppb | ＜0.2 | ICPMS | |
| 磷 (P) | ppb | ＜0.2 | ICPMS | |
|
Cr+Cu+Fe+ Ni+Zn |
ppb | ＜1.0 | ICPMS | |
