| 兴泰硅材——乙硅烷（Si 2H 6）产品标准 | ||||
|---|---|---|---|---|
| 项目 | 检测项目 | 单位 | 指标 | 分析方法 |
|
组 分 要 求 |
Si 2H 6 | Vol% | ≥99.998 | — |
| O 2 + Ar | ppm | ＜0.6 | GC | |
| N 2 | ppm | ＜0.8 | GC | |
| H 2 | ppm | ＜200 | GC | |
| CO | ppm | ＜1.0 | GC | |
| CO 2 | ppm | ＜0.6 | GC | |
| CH 4 | ppm | ＜2.1 | GC | |
| H 2O | ppm | ＜2.1 | GC | |
| Si 3H 8 | ppm | ＜50 | GC | |
| Si 4H 10 | ppm | ＜50 | GC | |
| SiH 4 | ppm | ＜500 | GC | |
| 硅氧烷 | ppm | ＜1 | GC | |
| 氯硅烷 | ppm | ＜0.2 | GC | |
|
金 属 检 测 |
钠(Na) | ppb | ＜5 | ICPMS |
| 铁(Fe) | ppb | ＜9 | ICPMS | |
| 钾(K) | ppb | ＜20 | ICPMS | |
| 钙(Ca) | ppb | ＜6 | ICPMS | |
| 铝(Al) | ppb | ＜3 | ICPMS | |
| 镍(Ni) | ppb | ＜5 | ICPMS | |
| 锌(Zn) | ppb | ＜5 | ICPMS | |
| 硼(B) | ppb | ＜8 | ICPMS | |
| 钴(Co) | ppb | ＜10 | ICPMS | |
| 铬(Cr) | ppb | ＜8 | ICPMS | |
| 铜(Cu) | ppb | ＜8 | ICPMS | |
| 镁(Mg) | ppb | ＜8 | ICPMS | |
| 锰(Mn) | ppb | ＜8 | ICPMS | |
| 磷(P) | ppb | ＜8 | ICPMS | |
| 钛(Ti) | ppb | ≤10 | ICPMS | |
